Figure 5.
SEM images of USAF group 10 elements 1 and 2 FIB-milled into diamondlike carbon ta-C at beam currents (a) I = 260 pA and (b) I = 9 pA and into HiPIMS CrN at beam currents (c) I = 260 pA and (d) I = 9 pA.
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