AFM	Atomic force microscopy
COC	Cyclic olefin copolymer
COP	Cyclic olefin polymer
CVD	Chemical vapor deposition
DLC	Diamondlike carbon
FIB	Focused ion beam
FOV	Field of view
HiPIMS	High-power impulse magnetron sputtering
ICM	Injection–compression molding
PC	Polycarbonate
PVD	Physical vapor deposition
SEM	Scanning electron microscope
ta-C	Tetrahedral hydrogen-free amorphous carbon film