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. 2021 Nov 15;25(1):3–17. doi: 10.1007/s11307-021-01665-2

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© The Author(s) 2021

Open AccessThis article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons licence, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons licence, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons licence and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this licence, visit http://creativecommons.org/licenses/by/4.0/.

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Fig. 4. — Different scanning systems and patterns. a Electrostatic MEMS scanning system [56]; b,c electromagnetic MEMS mirror scanner and close-up of a supporting flexure [58]; d electrothermal MEMS scanner[19]; e,f piezoelectric (PZT) fiber cantilever actuation systems [16, 39]; g PZT fiber cantilever scanning system with separated resonant frequencies for Lissajous scanning [13]; h thermoelectrically driven fiber cantilever scanner, capable of Lissajous scanning [59]; i spiral scanning pattern, common for piezo-based fiber scanners; j raster scanning pattern, commonly used in bench top microscopes; k Lissajous scanning pattern, common for MEMS-based scanners.