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. 2023 Feb 27;18(1):25. doi: 10.1186/s11671-023-03779-8

Fig. 13.

Fig. 13

SEM images of the piezoelectric thin film (a) cross-sectional view of AIN in the longitudinal mode, produced by [351] (b) cross-sectional view of AIN in the f shear mode produced by [274]