. 2023 Feb 27;18(1):25. doi: 10.1186/s11671-023-03779-8

Table 6.

Summary of common piezoelectric-based sensors for gases detection

Device type	Piezoelectric material	Device frequency (GHz)	Sensing material	Targeted gas	LOD (ppm)	Frequency shift (Hz/ppm)	Response time (S)	Recovery time (S)	Temp	Year	Refs
QCM	AT-CUT	0.005	Polymer/GNR	NH $_{3}$	70	106	1800	n/g	RT	2021	[169]
QCM	AT-CUT	0.009	ZIF	CO $_{2}$	n/g	n/g	n/g	n/g	RT	2018	[333]
QCM	AT-CUT	0.009	(ZIF-8)	CO $_{2}$	10,00,000	217	10	n/g	RT	2018	[215]
QCM	AT-CUT	0.01	rGO	CO $_{2}$	50–500	50	26	10	RT	2021	[176]
QCM	AT-CUT	0.01	MOF	CO $_{2}$	400–500	n/g	n/g	n/g	RT	2018	[179]
QCM	AT-CUT	0.025	PAAM/MWCNTs	Formaldehyde	0.5	3	80	100	RT	2021	[331]
SAW	ST-cut quartz	0.2	SiO $_{2}$ , TiO $_{2}$	NO $_{2}$	16	112 KHz/40ppm	80	50	RT	2017	[218]
SAW	ST-cut quartz	0.4341	Nickel–Graphene	CO $_{2}$	200	2.07	–	–	RT	2015	[336]
SAW	ST-cut quartz	0.2	GO Nanofilm	CH $_{3}$	500	620 Hz/500ppb	100	500	RT	2019	[338]
SAW	ST-cut quartz	0.2	Boehmite.	NH $_{3}$	10	1540 Hz/10ppm	n/g	n/g	RT	2019	[341]
SAW	Y-Z LiNbO $_{3}$	0.436	ZIF-8	CO $_{2}$	0.38	1.396 rad	n/g	n/g	RT	2018	[215]
SAW	Y-Z LiNbO $_{3}$	0.86	ZIF-8	CO $_{2}$	0.91	1.11 rad	n/g	n/g	RT	2020	[216]
FBAR	ZnO	0.8	Ethyl cellulose	CO $_{2}$	50 ppm	n/g	n/g	n/g	RT	2017	[306]
FBAR	AIN	2.4	MOFs	VOCs	1 ppm	0.28–1.27 KHz/ppm	n/g	n/g	RT	2020	[303, 304]
FBAR	AIN	2.45	Hybrid thin film	VOCs	40–180 ppb	0.05 KHz/ppm	n/g	n/g	RT	2019	[302]
FBAR	ZnO	3.1	MWCNT -hybrid	Formaldehyde	50–400 ppb	1.4-2.13 KHz/ppb	–	-	RT	2018	[301]
FBAR	AIN	4.4	polyethyleneimine nanofibers	Formaldehyde	37	1.216 KHz/ppb	25	60	RT	2018	[297]
FBAR	AIN	4.8	“Polyethyleneimine /CNT”	Formaldehyde	24–38 ppb	1.29-1.9 KHz/ppb	57	59	RT	2018	[298]

n/g = not given