Fig. 3. Experimental results.
a Measured frequency response from 10 to 1300 Hz at 0.05, 0.1, 0.15, and 0.2 g. b Transmissibility of output charge to acceleration in (a). c Transmissibility of output charge to acceleration from 10 to 200 Hz. d Measurement error from 10 to 200 Hz (relative to the transmissibility at 95 Hz in (c)). e Relationship between excitation acceleration and output charge of the accelerometer from 0.05 to 5 g at different frequencies. f Measured noise equivalent acceleration from 10 to 300 Hz