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Specification summary of the designed accelerometer
| Specification | Value | Measurement Times | Standard Deviation |
|---|---|---|---|
| Sensitivity | 22.74 pC/g | 5 | 0.25 pC/g |
| Frequency range | 10–200 Hz (5%) | 14 | N/A |
| Natural frequency | 867.4 Hz | 4 | 4.39 Hz |
| Noise | 5.6 at 20 Hz (with circuit) | 3 | 0.0634 |
