Table 4.

Summary of reported piezoelectric MEMS accelerometers in recent years

Research group		Material	Volume*	Noise density	Charge sensitivity	Voltage sensitivity	Natural frequency	Beam type
\		\	mm3	$\mu \mathrm{g}/\sqrt{\mathrm{Hz}}$	pC/g	mV/g	\	\
This work		PZT	20.97	5.6 @20Hz	22.74	4.96***	867.4 Hz	Cantilever
Trivedi et al.24		PZT	0.4	5800 @N/A	N/A	8.12	9.62 kHz	Four-symmetric
Hu et al.43		AlN	14.25	N/A	6.1***	7.95	1.29 kHz	Cantilever
Chen et al.38		AlN	32.4**	N/A	N/A	1.49	7.2 kHz	Ring
Tsai et al.39		PZT	33.92	N/A	N/A	2.21	6.5 kHz	Ring
Gesing et al.23		AlN	1.6	510 @100Hz	0.0981	N/A	19.1 kHz	Four-symmetric
Shen et al.44		PLZT	2.205**	N/A	0.04	N/A	7.68 kHz	Four-symmetric
Saayujya et al.22		ZnO	1	N/A	N/A	1.69	2.19 kHz	Cantilever
Hewa-Kasakarage et al.17	Beam 1	PZT	1.417**	N/A	5.1	3.26	363.95 Hz	Cantilever
	Beam 3	PZT	6.175**	1.74 @20Hz	50	15.67***	67.37 Hz	Cantilever
	Beam A5	PZT	0.975**	12.7@100Hz	3.43***	1	482.3 Hz	Cantilever

*Volume of the sensing element of the piezoelectric accelerometer

**Obtained by estimation according to the given picture of the real fabricated sensor in the corresponding paper

***Obtained using voltage/charge sensitivity multiplying/divided by the given capacitance of the piezoelectric sensing material