Table 5.
Summary of commercial low-noise MEMS accelerometers and designed sensor in this work
| Model | Axis | Volume | Noise density | Sensitivity | Bandwidth | Dynamic range |
|---|---|---|---|---|---|---|
| \ | \ | mm3 | mV/g | \ | g | |
| This work | 1 | 20.97 | 5.6 @20 Hz | 4.96(Not amplified) | 5%, 200 Hz | N/A |
| LIS2LO6AL | 2 | 40 | 30 | 480 to 1050 | 10%, 100 Hz | ±2/± 6 |
| LIS3L02AS4 | 3 | 264.328 | 50 | 160-240/480-720 | 10%, 100 Hz | ±2/± 6 |
| LIS344ALH | 3 | 24 | 50 | 160-240/480-720 | 10%, 1800 Hz | ±2/± 6 |
| ADXL354 | 3 | 73.92 | 22.5 @1 Hz | 400 | 3 dB, 1.9 kHz | ±2 |
| ADXL356 | 3 | 73.92 | 75 @1 Hz | 80 | 3 dB, 2.4 kHz | ±10 |
| ADXL1001 | 1 | 45 | 40 @1 Hz | 20 | 5%, 4.7 kHz | ±100 |
| ADXL1003 | 1 | 45 | 45 @100–10 kHz | 10 | 5%, 6.2 kHz | ±200 |
| ADXL1005 | 1 | 45 | 75 @100–20 kHz | 20 | 5%, 9 kHz | ±100 |
| SDI-1521J-005 | 1 | 250.56 | 12 @typical | 800 | 5%, 400 Hz | ±5 |
| SI1003 | 1 | 259.2 | 0.7 @in band | 900 | 3 dB, 550 Hz | ±3 |
| HP MEMS | 1 | 72 | 0.02 @1 Hz | 91,900 | 3 dB, 200 Hz | ±0.08 |
| MS1000T | 1 | 255.85 | 102 @in band | 90 | 3 dB, 200 Hz | ±30 |