Table 2. Focussed ion beam (FIB) current (targeted value) in nA.

	Argon	Xenon	Nitrogen	Oxygen
20 kV	6.2	3.3	14	4.2
	2.4	1	1.8	1.4
	0.2	0.1	0.32	0.29
30 kV	7.6	4	24	5.6
	2	1	1.7	1.7
	0.2	0.1	0.27	0.23