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Schematic diagram of the 360° rotating RF plasma reactor. 1: gas inlet port; 2: secondary gas inlet port (for low vapor pressure monomers); 3: MKS Baratron pressure transducer; 4: exhaust valve controller; 5: ferrofluidic feedthrough valves inside aluminum housing; 6: ground electrode; 7: hot electrode; 8: butterfly valve; 9: flowmeter; 10: two external ground electrodes
