This PDF file includes:

• Fig. S1. Etching of C/SiO₂ nanoparticles in HF solution.
• Fig. S2. Top-view SEM characterization of HCS electrode and ALD Al₂O₃ HCS electrode after initial electrochemical lithium plating.
• Fig. S3. XPS characterization.
• Fig. S4. Cross-sectional SEM characterization of ALD Al₂O₃/HCS electrode after lithium plating.
• Fig. S5. Optical and SEM images of ALD Al₂O₃/HCS electrodes after different amounts of electrochemical lithium plating.
• Fig. S6. Cycle performance in carbonate electrolyte with and without additives.
• Fig. S7. Cycle performance of symmetric cells.
• Fig. S8. Cycle performance in ether electrolyte.
• Fig. S9. STEM-EDX line scan of ALD AlF₃–coated HCS.
• Fig. S10. Additional cycle performance data of ALD Al₂O₃/HCS and ALD AlF₃/HCS electrodes.
• References (38, 39)

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