This PDF file includes:

• Fig. S1. High-resolution XPS characterization.
• Fig. S2. Deconvolution of x-ray photoelectron spectra of stepwise functionalized SiNWS.
• Fig. S3. Fluorescence imaging for exploring bioorthogonal ligation.
• Fig. S4. Dynamic changes of Cy5 fluorescence intensity upon disulfide cleavage by DTT.
• Fig. S5. Scheme of CTC capture on Tz-grafted magnetic beads.
• Fig. S6. Scheme of RT-ddPCR analysis of ALK/ROS1 rearrangements in CTCs.
• Fig. S7. Dynamic ranges for RT-ddPCR quantification of ALK/ROS1 rearrangements.
• Fig. S8. Comparison of cell lysis on-chip with cell lysis of DTT-released cells.
• Table S1. CTC purity during capture and release processes.

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