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. Author manuscript; available in PMC: 2020 Sep 8.
Published in final edited form as: ACS Appl Mater Interfaces. 2020 Aug 5;12(33):37732–37740. doi: 10.1021/acsami.0c09630

Figure 2.

Figure 2

(a) Measured thickness, (b) calculated density, (c) measured water uptake, and (d) measured Young modulus for the oCVD thin films.