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. Author manuscript; available in PMC: 2010 May 12.
Published in final edited form as: J Vac Sci Technol B Microelectron Nanometer Struct Process Meas Phenom. 2009 Dec 4;27(6):3099–3103. doi: 10.1116/1.3264675

Fig. 5.

Fig. 5

Representative data of impedance vs. time for 20 um diameter beads passing through a 50 um channel.