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. Author manuscript; available in PMC: 2012 Oct 1.
Published in final edited form as: J Vac Sci Technol B Nanotechnol Microelectron. 2011 May 10;29(3):032001. doi: 10.1116/1.3581102

TABLE I.

Summary of cantilever and magnet properties. All values were measured at a field of 0 T unless otherwise indicated. All of the cantilevers studied had dimensions of 200 µm × 4 µm× 0.34 µm and unloaded resonance frequencies of f0 ≈ 9000 Hz.

quantity C1 C2 C3 C4 C5 C6 unit
f0 6631 6053 5054 6486 5351 4838 Hz
Q (at 0 T) 67,900 74,400 41,000 86,700 43,200 94,000 (unitless)
Q (at 5 T) 68,600 75,500 39,600 84,200 41,600 (unitless)
k 780 500 563 ± 63 780 780 703 ± 52 ×10−6 N m−1
Γ 275 177 432 221 537 246 ×10−15 N s m−1
Fmin 8.0 6.4 10.0 7.2 11.2 7.6 ×10−18 N
lm 1500 1500 1500 1500 1500 1500 nm
loverhang ~300 ~300 ~300 ~300 0 0 nm
wm 220 120 120 220 220 220 nm
tm 90 90 90 90 90 90 nm
tAl2O3 0 0 0 0 5.6 5.6 nm
μsat 9.71 ± 0.98 4.50 ± 0.90 3.21 ± 0.30 9.08 ± 1.36 9.05 ± 1.43 11.72 ± 1.27 ×10−15 A m−2
μ0Msat 0.41 ± 0.04 0.35 ± 0.07 0.25 ± 0.03 0.38 ± 0.06 0.38 ± 0.06 0.49 ± 0.08 T
ΔN 0.81 ± 0.08 0.51a 0.93 ± 0.10 0.99 ± 0.15 0.86 ± 0.15 0.40 ± 0.10 (unitless)
μsatnominal
14.18 7.73 7.73 14.18 14.18 14.18 ×10−15 A m−2
a

For this fit, ΔN was calculated from the magnet shape as described in the text.