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Calculated chemical properties of four TPSs (Figure 3) and actual ArF dose-to-clear (E0) and EUV dose-to-size (Esize) (50 nm pitch line-and-space patterning) from Ref. [10].
| PAG Cations | HOMO (eV) | LUMO (eV) | Band Gap (eV) | pKa (DPS) | Dose (mJ/cm2) | |
|---|---|---|---|---|---|---|
| ArF (E0) | EUV (Esize) | |||||
| TPS | −11.942 | −3.761 | 8.181 | 1.414 | 1.6 | 12 |
| MDP | −10.822 | −3.127 | 7.695 | 1.670 | 4.9 | 9.8 |
| MMP | −10.364 | −2.920 | 7.444 | 1.694 | 5.4 | 9.8 |
| MPP | −9.985 | −2.922 | 7.063 | 1.905 | 9.9 | 11.5 |
