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. 2024 Jan 27;15(2):196. doi: 10.3390/mi15020196

Usable Analytical Expressions for Temperature Distribution Induced by Ultrafast Laser Pulses in Dielectric Solids

Ruyue Que 1, Matthieu Lancry 1, Bertrand Poumellec 1,*
Editor: Antonio Ancona1
PMCID: PMC10890633  PMID: 38398925

Abstract

This paper focuses on the critical role of temperature in ultrafast direct laser writing processes, where temperature changes can trigger or exclusively drive certain transformations, such as phase transitions. It is important to consider both the temporal dynamics and spatial temperature distribution for the effective control of material modifications. We present analytical expressions for temperature variations induced by multi-pulse absorption, applicable to pulse durations significantly shorter than nanoseconds within a spherical energy source. The objective is to provide easy-to-use expressions to facilitate engineering tasks. Specifically, the expressions are shown to depend on just two parameters: the initial temperature at the center denoted as T00 and a factor Rτ representing the ratio of the pulse period τp to the diffusion time τd. We show that temperature, oscillating between Tmax and Tmin, reaches a steady state and we calculate the least number of pulses required to reach the steady state. The paper defines the occurrence of heat accumulation precisely and elucidates that a temperature increase does not accompany systematically heat accumulation but depends on a set of laser parameters. It also highlights the temporal differences in temperature at the focus compared to areas outside the focus. Furthermore, the study suggests circumstances under which averaging the temperature over the pulse period can provide an even simpler approach. This work is instrumental in comprehending the diverse temperature effects observed in various experiments and in preparing for experimental setup. It also aids in determining whether temperature plays a role in the processes of direct laser writing. Toward the end of the paper, several application examples are provided.

Keywords: temperature distribution, femtosecond pulsed laser, interaction laser–dielectric solid

1. Introduction

In the context of an ultrafast laser interacting with solids, temperature plays a special role in the transformation processes. Some of the processes can be thermally activated, others can be temperature driven, such as phase transition but not thermally activated. The objective of this paper is to develop an analytic approximation to predict the behavior of the spatial temperature distribution and the temperature evolution over time according to the key laser parameter combinations and then to deduce their importance. This approach seeks to provide physical insight and semi-quantitative results without relying on heavy and overly detailed finite element calculations. This methodology resonates with the philosophy espoused by Paul Dirac in 1929, as documented in the Proceedings of the Royal Society of London [1]:

The underlying physical laws necessary for the mathematical theory of a large part of physics and the whole of chemistry are thus completely known, and the difficulty is only that the exact application of these laws leads to equations much too complicated to be soluble. It therefore becomes desirable that approximate practical methods of applying quantum mechanics should be developed, which can lead to an explanation of the main features of complex atomic systems without too much computation”.

In the ultrafast laser–matter interaction process, the energy from the laser pulse that has an extremely short pulse duration (10−11–10−14 s) is partially injected into a small focal volume of transparent dielectric solids. This intense laser pulse with high irradiance (>1013 Wcm−2) in the focal region stimulates a series of complex dynamic processes, such as multiphoton ionization, tunneling ionization, inverse bremsstrahlung absorption, and avalanche ionization within an ultrashort time scale [2]. Such interactions lead to high-density electron excitations in condensed matter, creating plasma with high temperatures and pressures. This plasma expands rapidly in the focal zone, resulting in structural modifications as energy relaxes through phonon–electron interactions [3,4].

In the low repetition rate regime, thermal accumulation is usually negligible in the processing. The temperature decreases to the initial degree before the next pulse arrives. The non-linear nature of the optical absorption can confine the formed modifications to the focal volume. These advantages minimize the thermal collateral damage and heat-affected zone [5]. Thus, ultrafast laser direct writing (ULDW) is suggested as a general technique to induce highly localized modifications and optical structures within/near the focus in a wide range of transparent solids [6,7,8,9,10,11]. In this regime, denoted as non-thermal ULDW, the repetition rate (RR) is usually a few kilohertz, and the fabrication efficiency is also limited by the low pulse RR.

In contrast, when the pulse repetition rate of the ultrafast laser increases, the interval between successive laser pulses is less than the time needed for the absorbed energy to diffuse out of the focal volume and this induces an obvious localized heat accumulation effect [11,12,13,14,15,16,17,18]. In this case, for a given pulse energy, the temperature increases continuously in the focal zone before stabilizing. The final diffusion of the heat into the surrounding material may lead to a material melting beyond the focal volume over a longer time scale. In this regime, denoted as thermal ULDW, the melted modified region is much larger than the focus size. Paralleling to the wide applications of non-thermal ULDW, the localized thermal accumulation has been demonstrated to be important in the ULDW for inducing various phenomena and structures in the transparent solids and improving the performance of the fabricated devices. For example, the thermal accumulation can lead to a higher symmetry of the waveguide cross-section, reducing the propagation loss and enhancing the fabrication efficiency [12,15,16]. Thermal accumulation in the ULDW can also induce unique phenomena, such as elemental redistribution and local crystallization, which are nearly not achievable in the non-thermal ULDW [11,19,20,21,22,23]. In the thermal ULDW regime, the temperature distribution can work as a driving force to redistribute the elements or reorganize the structures in the thermal melted region. The thermal accumulation effect has also been reported to be critical for the formation of periodic nanogratings in some glass systems [24]. Moreover, the thermal accumulation induces a high temperature that can produce thermally excited free electrons, which seeds the avalanche ionization and significantly enhance absorptivity [25]. As a result, more energy can be absorbed, and this further increases thermal accumulation. Until now, thermal accumulation has been established to be an important assistor in many cases to help ULDW to achieve various applications in fundamental science and technological manufacturing [14,15,16,21,25,26]. Clarifying the principle of thermal ULDW and reviewing its current stage in the applications are highly urgent and significant for guiding future work [11,15,16].

For this aspect of the work, Lax et al. in 1977 [27] published the first paper that described the 3D spatial distribution of the temperature rise induced by the Beer–Lambert absorption of a static Gaussian CW laser beam in cylindrical geometry. Then, Sanders in 1984 [28] described an extension of these calculations for scanning beams and provided analytic expressions. In 1991, Haba et al. [29] described the calculation of a 3D spatial distribution for the Beer–Lambert absorption of a scanning Gaussian pulsed laser in cylindrical geometry. However, even if the expression was quite complete but numerically solvable, there was no extended discussion on the laser/material parameters. Then, Eaton et al. [15] in 2005 and Zhang et al. [30] in 2007 performed finite difference calculations, for simple pulsed and CW Gaussian beams in spherical geometry, preventing easy material analysis. In 2007, Sakakura et al. [18] solved the Fourier equation in the frame of cylindrical geometry for energy delivered by a Gaussian pulsed fs laser (pulse duration 220 fs, RR 3 Hz, pulse energy < 1 μJ). With such a weak RR, the calculation can be restricted to one pulse as the experimental measurement (a lens effect) was smaller than 1 ms. However, it is not a special case and for material treatment, a large number of pulses are required. That is why Miyamoto et al. [31] in the same year, deduced analytical expressions for scanning uniform pulsed laser energy deposition in a parallelepiped volume of width 2 w corresponding to the scanning CW beam diameter at 1/e and length corresponding to the absorption length (1/α). These calculations were used also by Beresna et al. [32] and applied to a particular case, i.e., borosilicate. In 2011, Miyamoto et al. [25] considered a cylindrical source with its full width dependent on z in order to account for the convergence of the beam or the non-linear properties including the self-focusing. In 2012, Shimizu et al. [33] used a static cylindrical Gaussian beam and Gaussian energy deposition in depth for multi-pulsed laser energy deposition but solved the problem numerically. Lastly, in 2019 and 2020, Rahaman et al. [34,35] proposed an analytical solution using Duhamel’s theorem and Hankel’s transform method, for a transient, two-dimensional thermal model. We summarized the above research in Table 1 below, to compare with our work.

Table 1.

State of the art of the thermal simulation of laser–matter interactions.

Laser Type Mode Geometry Source Shape Solving Method Refs.
CW static cylindrical Gaussian(r)
Beer–Lambert(z)
analytical Lax [27]
pulsed scanning three axes Gaussian(x,y)
Beer–Lambert(z)
analytical Sanders [28]
pulsed scanning three axes Gaussian(x,y)
Beer–Lambert(z)
analytical Haba [29]
pulsed static spherical Gaussian(r) finite difference Eaton [15] or Zhang [30]
pulsed quasi-static cylindrical Gaussian(r)
Beer–Lambert(z)
analytical one pulse Sakakura[18]
CW scanning three axes uniform deposition in parallelepiped volume analytical Miyamoto [31]
pulsed static cylindrical Gaussian(r,z) analytical Miyamoto[25]
pulsed static cylindrical Gaussian(r)
Gaussian(z)
numerical Shimizu [33]
pulsed scanning cylindrical Gaussian(r)
surface absorption
analytical Rahaman [34,35]
pulsed quasi-static spherical Gaussian(r) analytical this work

In short, the drawback in the available literature is that the authors did not provide simple expressions that allow the reader to easily understand how each parameter of lasers and materials influences the evolution of the temperature distribution, and to control the thermal effect in transparent materials with non-linear optical absorption for which the effect is mainly in volume for a focused beam. However, beyond this step that corresponds to the absorption of a small part of the pulse energy, the absorption becomes linear [36]. This is the reason why we present the analytical approach or link the properties of the materials to the shape of the temperature distribution and use it for explaining the phenomena such as:

  • -

    The appearance of several regions in the heat-affected volume including change of the structure of a glass, crystallization, phase separation, thermal erasure while writing providing that energy endo or exo is negligible in front of the laser one;

  • -

    The variations in the shape of the interaction volume according to the laser parameters like a change of laser track width, change of laser track morphology.

For this purpose, we restricted ourselves assuming that the physical properties of the material are independent of the temperature, but this does not prevent the possibility of physical deductions. We used the simplest solution of the Fourier equation in spherical geometry, i.e., a Gaussian shape along the perpendicular and longitudinal direction of the beam propagation direction. This applies not only to the sample surface but also to multiphoton absorption by stating the coordinate origin at the geometrical or effective focus. Since the typical application of this model is the thermal accumulation of a high focused beam in a material with non-linear absorption. Namely, the cylindrical symmetry and the Beer–Lambert law along z cannot be considered. We have also considered that the pulse duration (smaller than a few ns) is much smaller than the diffusion time so that the initial temperature distribution is defined by the shape of the absorbed energy source. This is applicable in most cases to femtosecond and nanosecond lasers as the diffusion time is usually of the order of a fraction of μs in inorganic glasses and a few μs in organic materials. In addition, material phase change and non-linear optical effects are not considered in this model except for the presence of coefficient A (see below).

This study was motivated by seeing nowadays that, as the means of simulation are easily accessible, the physical sense is hidden or even lost, which prevents the correct management of the laser parameters according to targeted property modifications.

2. Starting Formulation

From a theoretical point of view, the heat deposited at a point by the laser diffuses into the material by following Fourier’s law q=κ̿T where q is the heat flow (energy per unit area and time). Fourier considers it to be linearly dependent on the temperature gradient. κ is the thermal conductivity, in general, a tensor of order 2 which relates the gradient vector of T to the flux. Its dimension is energy (J/m2·s·K). For isotropic materials, such as glasses, one will suppose that this tensor is reduced to a scalar. To calculate (in principle) the evolution and distribution of T, we start with the law of the conservation of energy, dρQdt+·q=source termssink terms. The source term is the laser energy density deposited per unit of time (i.e., absorbed laser power), written symbolically as δρQδt. Its spatial shape defines the symmetry of the problem. For the sake of simplicity for demonstrating physical conclusions, we have assumed spherical symmetry. This means that we do not take into account some changes of focal volume with incident pulse energy due to Kerr self-focusing and electron plasma defocusing. We assume that there were no heat annihilation terms (for example, endothermic chemical transformation), sink terms=0. Using the definition of specific heat, dρQdt=ρ·Cp·dTdt, ρ and Cp are the density and specific heat capacity, respectively. ·q=·κT=Dth·ΔT, with diffusivity Dth=κρ·Cp, Δ is the Laplace operator written in spherical symmetry, Δ=2=2r2+2rr. Considering a beam moving not too fast, convection can be neglected (i.e., the time derivative of the spatial coordinate), dTdt is thus written as Tt. Therefore, we obtain the following equation:

Tr,ttDth·ΔTr,t=1ρCpδρQδt (1)

Since the pulse duration is much less than the diffusion time (w2/Dth with w is the beam waist radius at 1/e), the latter is at the scale of 10−7 s and 10−6 s, the diffusion process can be considered therefore to be well separated from the deposition process. During the pulse, a deposition of energy density takes place, but the diffusion does not begin, so Dth·ΔT=0, and Equation (1) becomes:

Tr,tt=1ρCpδρQδt (2)

Assuming a Gaussian shape of δρQδtr,t=A·Epπ32w3·expr2w2·f(t), where w is the beam waist radius (at 1/e), f(t) is the pulse shape (integral of f(t) on the pulse time = 1), Ep is the energy of the pulse, A represents the absorbed fraction of the pulse energy. Therefore, Tr,0Troom=1ρCppulseδρQδtdt=T00·expr2w2 with:

T00=A·Epπ32ρCpw3 (3)

After pulse energy deposition, diffusion begins to operate, and Equation (1) becomes:

Tr,ttDth·ΔTr,t=0 (4)

Using the initial and boundary conditions on solutions of Equations (2) and (4), we obtain:

Tr,t=T00·w3w2+4Dth·t32·expr2w2+4Dth·t+Troom (5)

Equation (5) describes a single-pulse-induced temperature distribution over time. T00 is the maximum temperature induced by a laser pulse at the focus center. Troom is the ambient temperature, which will be omitted for ease of calculation. The temperature should thus be understood as the temperature increment above the initial sample temperature.

It is important to note that when utilizing the spherical model, the deposited energy volume will consistently yield a higher temperature than reality, as the size along z is usually larger than the waist radius. Given our primary concern lies in assessing the temperature’s dependence on various parameters, it is possible to adjust the actual calculated value, which is notably affected by the absorption fraction A, to align it more closely with reality.

In the case of the absorption of N pulses, we easily obtain the evolution of the distribution considering the linearity of the differential equation and making up the sum of the solution for one impulsion but shifted in time τp=1/RR, where RR is the pulse repetition rate:

Tr,t=T00·n=0N1=integer partt·fN1w3w2+4Dth·t3/2·expr2w2+4Dthtn·τp (6)

With τd=w2/4Dth,rw=rw, Equation (6) reads:

Trw,t=T00·n=0N111+tn·τpτd3/2·exprw21+tn·τpτd (7)

We note that the variables involved in Equation (7) are the ratio between the period of the pulses τp and the diffusion times τd, while the other laser and material parameters are involved in the amplitude T00. Therefore, we introduce the parameter Rτ:

Rτ=τpτd (8)

Therefore, Equation (7) becomes:

Trw,tT00=n=0N1=integer part tτpN111+tτpn·Rτ32·exprw21+tτpn·Rτ (9)

where N is the number of pulses defined from the time t.

The objective now is to compute the value of the temperature T according to the coordinate rw when N 1/Rτ. We will show how the temperature changes with the number of pulses according to heat accumulation (hence Rτ), i.e., when T at the end of the period cumulates with the increase induced by the absorption of the next pulse. We will also describe the properties of the temperature on average in the pulse repetition period. We will also show that a steady state can be reached and give the practical number of pulses for that.

3. Final Temperatures at Steady State

At first, we separate the temperature problem into two cases: (1) at the center, i.e., rw=0; (2) for general cases when rw0 including case (1). Again, for the sake of simplicity, T00 will be usually omitted. Therefore, the subsequent temperatures will virtually include T00.

3.1. At the Center

At the center, rw=0, and thus, from Equation (9):

T0,t=n=0N1=integer part tτpN111+tτpn·Rτ32 (10)

Calling Nt=tτp. The temperature evolutions over the generalized pulse number Nt for several Rτ are shown in Figure 1.

Figure 1.

Figure 1

Plot of the relative temperature (Equation (10)) at the center rw = 0 according to the generalized pulse number Nt=tτp with Rτ=0.2, 2, 20 until several pulse numbers (a) 10, (b) 20, and (c) 100.

From Figure 1 we observe that:

  • -

    T0,Nt oscillates between a minimum (Tmin) and a maximum (Tmax) in each period between two pulses;

  • -

    The oscillation amplitude (Tosc) seems to be the same, whatever Rτ;

  • -

    T seems to reach a steady state as Nt becomes large (already seen in various papers [29,31,32]);

  • -

    The number of pulses to reach this ‘steady state’ appears very small for a large Rτ but larger for small Rτ values. For a larger Rτ, the temporal overlapping of temperature increase contributions from consecutive pulses is weaker, whereas it increases (heat accumulation) when Rτ is smaller.

3.1.1. The Oscillation Amplitude Tosc

We observe the oscillations of temperature on time in Figure 1 on each period. Just after the pulse energy deposition, the temperature experiences a sudden increase and then a slow decrease until the next pulse arrival. It is important to know the amplitude of the temperature oscillations (Tosc) because when Tosc is large, at the beginning of a period, temperature may be high enough for transformation but in a short time, and at the end of the period during a long time duration, the temperature can be low, maybe achieving another transformation. The middle part could therefore often be the most active part.

The Limit of the Temperature Oscillation Amplitude after an Infinite Number of Pulses

The question here is: how do the oscillations evolve in time according to the pulse number N for a given diffusion time? If the period is large (Rτ large), we expect independent pulses and thus the amplitude will be T00. However, when the pulse period is small (Rτ small), can we imagine a smaller oscillation? The next calculation provides answers.

For that purpose, we compare the difference between the maximum T and minimum T of the Nth pulse, Tmax(0,N) − Tmin(0,N) = T(0, tN) − T(0, tN+1ε), where ε is an arbitrary small quantity for ensuring that the number of pulses in the expression (11) is the same. Tmax is defined just after the deposition of the Nth pulse, so at the beginning of the pulse, tN = (N − 1)τp. Tmin is at the end of the pulse period, just before the (N + 1)th pulse arrival. Using Equation (10), we have:

Tmax0,N=T0,t=tN=N1τp=n=0N111+N1n·Rτ32=n=0N111+n·Rτ32 (11)

Tmin will be at t = N·τp − ε, thus not containing the temperature contribution induced by the (N + 1)th pulse, so:

Tmin0,N=T0,t=tN+1ε=N·τpε=n=0N111+Nn·Rτ32=n=1N11+n·Rτ32  (12)

Therefore,

Tosc0,N=Tmax0,NTmin0,N=111+N·Rτ32 (13)

and

Tosc0,=limNTosc0,N=1 (14)

When N1/Rτ, Tosc tends to 1. This means T00 in the absolute scale. Tosc according to the pulse number is shown in Figure 2. It reaches a maximum value 1, i.e., T00, when N1/Rτ. At the beginning of the irradiation, Tosc starts with a value smaller than T00, where a smaller Rτ leads to a smaller oscillation at the beginning. When the pulse number N increases until some value, Tosc reaches T00. When Rτ is large, e.g., 10, the amplitude is equal to T00 whatever N, as pulse contributions are separated (no overlapping). With the expression of T00 (Equation (3)), which is proportional to pulse energy (Ep), the temperature oscillation range can be determined.

Figure 2.

Figure 2

Temperature oscillation Tosc0,N/T00 (here quoted Tosc(N,Rτ) dependence according to pulse number and for three values of Rτ = 0.1, 1, and 10).

The Effective Number of Pulses for Reaching the Limit of Tosc(Nsso0)

When will the temperature in the material reach a stable oscillation? In practice, we can calculate a real number of pulses (Nsso0) to closely reach the oscillation limit. (In notation, Nsso0, where sso means steady state of oscillation, 0 means the situation when rw = 0).

Consider when Tosc0,Nsso0=(1ε)·Tosc(0,), the limit is practically reached, where ε is a small quantity, i.e., a few % (based on the actual situation). Thus, it is:

Tocs(0,)Tosc(0,Nsso0)Tocs(0,)<ε  (15)

Then, we have:

Nsso0=1Rτ1ε231 (16)

The plot of Nsso0 is shown in Figure 3, note that the actual number of pulses is the integer part above 1 (as ε should be smaller, bounded by ε=11+Rτ23). Some specific parameters are given below for visualizing this value. With ε = 3%, when Rτ=1 (conceivable combinations of material parameters and laser RR), Nsso0=9.36. So, after 10 pulses, the amplitude of the oscillating temperature reaches 0.97 T00. When Rτ is large, e.g., Rτ=10, Nsso0=0.94, so only one pulse rules the oscillation amplitude, and we can understand that pulse contributions are separated. When Rτ is smaller, Nssoo increases rapidly, e.g., Rτ=0.1, i.e., 1/Rτ=10, Nssoo=94. Beyond Nssoo pulses, the oscillation amplitude becomes almost constant. According to the pulse period, we can know the time to reach the constant oscillation amplitude. By comparing with pulse number N = 1 (blue dashed line in Figure 3), we can deduce in what condition (Rτ larger than which value) the temperature oscillation is constant since the first pulse.

Figure 3.

Figure 3

Number of pulses to reach the oscillation amplitude limit Nsso0 according to Rτ from 0.1 to 100, with ε = 3%. For 1/Rτ > 0.1, weak heat conduction, large RR, and vice versa.

To conclude on this point, Equations (13) and (14) provides that the temperature oscillation amplitude is T00 after Nsso pulses and at an oscillatory steady state. Equation (16) provides the effective number of pulses for reaching it. It takes more time when Rτ is very small (slow heat diffusion or high pulse RR) but the requested time remains quite small. In particular, the temperature oscillation amplitude is only relevant to certain laser parameters of a single pulse and material parameters of the energy-to-temperature conversion relationship, independent of RR and diffusion parameters.

Tmin and Tmax

We demonstrate in Appendix B that the temperature induced by laser pulses will not increase indefinitely but converge to a finite value. This defines a steady state that corresponds to the equilibrium between the energy supplied by the laser and the energy diffusing out of the irradiated voxel.

The Limit of Tmax and Tmin

Tmin: The analytical expression of the minimum temperature is transformed from the sum expression Equation (12), with details found in Appendix C. Therefore, we obtain:

Tmin0,N121+Rτ32+121+N·Rτ32+2Rτ11+Rτ11+N·Rτ (17)

This expression shows the increase of Tmin according to N and Rτ. It is plotted in Figure 4.

Figure 4.

Figure 4

Tmin/T00 at rw = 0 according to N increasing from 1 to 10,000 when Rτ = 0.2, 1, and 5.

The final limit of Tmin, i.e., when N1/Rτ is given below:

Tmin0,=121+Rτ32+2Rτ11+Rτ2Rτ11+Rτ (18)

The same method has been applied to obtain the Tmax limit, and the detail can be also found in Appendix C. We have thus:

Tmax(0,N)1+121+Rτ3/2+121+(N1)Rτ3/2+2Rτ11+Rτ11+(N1)Rτ (19)

When N1/Rτ, the Tmax limit is:

Tmax0,=1+121+Rτ32+2Rτ11+Rτ1+2Rτ11+Rτ (20)

From these expressions, we see that the difference between Tmax0, and Tmin0, is 1, which is consistent with the oscillation amplitude limitation (Equation (14)).

When Rτ reaches 0 (e.g., by increasing pulse RR or with the material of small thermal conductivity), Equations (18) and (20) are approximately proportional to 2Rτ. Reintroducing here exceptionally T00 (Equation (3)), we obtain:

Tmax0,~Tmin0,~T00·2Rτ=2AEpπ32ρCpw3Rτ=2AEpτdπ32ρCpw3τp=2AEpfπ32DthρCpw=2APπ32κw (21)

with P being the average power.

We note that the temperature is now dependent on the incident laser power as is the case for CW lasers, and inversely dependent on the thermal conductivity (κ), whereas T00 was dependent on the incident pulse energy (Ep), not on the thermal diffusivity but just on the heat capacity of the material. This is due to large time-overlapping of the pulse contribution when Rτ reaches 0.

Therefore, increasing the pulse RR with constant Ep leads to a faster temperature increase but NOT with constant average power. The same maximal temperature can be achieved with or without heat accumulation. However, Tmin, which is negligible in front of Tmax for large Rτ values, increases until it almost equals Tmax for small Rτ values (large RR).

The Effective Number of Pulses for Reaching the Limit of Tmin and Tmax (Nssmin0,Nssmax0)

Nssmin: The effective number of pulses to reach the steady state Nss is defined to have temperature reaching Tmin or Tmax. As the same definition as for Nsso, the first approximation of Nssmin is obtained by solving the following assertion, Tmin0,NTmin0,Tmin0,<ε, with ε being a small quantity. Posing X=11+N·Rτ, it reads X322RτX+ε·Tmin0,>0. This cubic equation has three roots, where the physical one is X<ε·Tmin0,2Rτ. Therefore,

Nssmin0>1Rτ2Rτ·ε·Tmin0,21 (22)

Nssmax: With the same method, we obtain:

Nssmax0>1Rτ2Rτ·ε·Tmax0,21 (23)

The Nss for reaching closely the steady state (with ε departure). Tosc(0,∞), Tmin(0,∞), and Tmax(0,∞) are plotted in Figure 5 according to Rτ (with ε=3%).

Figure 5.

Figure 5

The effective number to reach the limit of Tosc, Tmin, and Tmax according to Rτ from 0.1 to 100 for ε = 0.03. The boundary point is at Rτ = 15.7.

From Figure 5, we can see that with 1/Rτ increasing, the effective pulse numbers for reaching the steady state increases whether for Tosc, Tmin, or Tmax. For practical use, it is better to define one Nss for calculation. When Rτ is large, since the value of Tmin is almost 0 (no pulse superimposition), it is therefore not meaningful to take it into consideration. For Nsso and Nssmax, the value converges to 0 when Rτ is large because it can be considered to be already at steady state when the pulses are separated. As observed, the green dash is always higher than the red line when N > 1, and the oscillation reaches the steady state faster than Tmax. Therefore, Nssmax0 is the suitable and practical number of pulses needed for reaching the steady state. Some examples for the Nssmax value are shown in Table 2 (with ε = 0.03 for organic materials and ε = 0.06 for inorganic materials):

Table 2.

Pulse number needed (Nss) for reaching the steady state in materials, using Equation (23).

SiO2 LNS STS Glycine Zeonex Sucrose Nifedipine
τd (µs) 0.28 0.235 0.04 0.28 0.42 4.9 1.63
RR (kHz) 200 200 200 200 200 200 200
Rτ 18 21 125 18 12 1 3
Nssmax 1 1 1 1 3 641 80

We observe that for the inorganic material examples in the table, with RR = 200 kHz, there is no heat accumulation, pulse contributions are separated, there is no transient time, and the time variation of T is from one pulse contribution. However, for the organic material examples, except for glycine crystal, with same RR, the laser induces heat accumulation. Therefore, not only can we deduce from the known laser and material parameters whether or not there will be heat accumulation, but we can also easily backtrack on how to choose a laser RR that avoids or guarantees heat accumulation in a particular material.

We can thus define the boundary between the two domains by Nssmax(Rτ,ε) = 1 as shown in Figure 5 by the blue point. When the effective pulse number is equal to 1, the pulse contribution is separated, so it is considered that there is no heat accumulation. This is the heat accumulation definition we propose with a new perspective. Rτ varies with the level of sensitivity of the targeted transformation, for ε = 0.03, Rτ = 15.7, for ε = 0.06, Rτ = 7, for instance.

From Nssmax together with the laser pulse RR, we know the time needed to reach the steady state. Accordingly, the time for reaching the steady state tss0 is (considering the effective number to reach the Tmax limit):

tss0=Nssmax0τp=τd2Rτ·ε·Tmax0,21 (24)

Figure 6 show the plots versus 1Rτ=RR·w24·Dth according to three different diffusion times: 0.28 µs (silica, glycine), 1.63 µs for nifedipine, and 4.9 µs for sucrose.

Figure 6.

Figure 6

The time in µs to reach the steady state according to 1/Rτ value for glycine or silica (red), nifedipine (blue dash), and sucrose (green). The value of the second parameter in tss corresponds to τd in Table 2.

For small enough values of Rτ, the time reaches the value τd/ε2, i.e., 1111τd for ε = 3%. Note that for inorganic glass and glycine crystal cited above with τd = 0.28 µs, this time is smaller than 1 ms (red profile). However, for sucrose and nifedipine, this time is 5.5 ms and 1.8 ms, respectively. In any case, the important fact is the independency of the transient time with Rτ for small values (see for Rτ < 1) and thus it is bounded to quite a small value.

For large enough values of Rτ, this time is limited by the period τp that increases with Rτ.

3.2. Time Behavior out of the Center (rw=r/w0)

When rw ≠ 0, we come back to the expression Equation (10):

Trw,t=n=0N1=integer part (t/τp)N111+(tτpn)·Rτ3/2·exprw21+tτpn·Rτ

Figure 7 shows the temperature evolution based on the above expression over time at two relative distances rw = 1 (Figure 7a,b) and rw = 2 (Figure 7c,d).

Figure 7.

Figure 7

Plot of the relative temperature (T/T00) with Rτ = 0.2, 2, 20 at (a,b) r = w from (a) pulse 1 to pulse 20 and (b) pulse 100 to pulse 120 (c,d) r = 2w from (c) pulse 1 to pulse 20 and (d) pulse 100 to pulse 120. Inserts (b,d) zoom of pulse 106–108 of Rτ = 2 and 20 at r = w and r = 2 w, respectively.

We observe the following differences according to radius rw = 0, 1, 2:

  • -

    The amplitude of oscillation is less than 1 (in the unit of T00) for increasing radius;

  • -

    The maximum temperature during a period is still at the beginning of the pulse deposition for rw = 1 with these three Rτ, while at rw = 2 the maximum temperature is no more at the beginning. That is because there is time for heat to diffuse from the center to rw. This renders the following calculation of Tmax for increasing radius to be more complex.

3.2.1. Tosc, Tmin, and Tmax

The Limit of Tmax and Tmin (when N1/Rτ)

To calculate the oscillation amplitude Trosc, it is the same as the case of rw = 0. In general, we compare the difference between the maximum T and minimum T in the Nth pulse period. Tmin is still considered at the end of the Nth one, i.e., when t=N·τp before the absorption of the (N + 1)th pulse, so:

Tminrw,N=n=0N111+Nn·Rτ32exprw21+Nn·Rτ (25)

However, since Tmax in some situations can be in the middle of the pulse period, we set xm, 0xm1 to define the place where the Tmax is. Therefore, Tmax is at the time t=(N1+xm)τp:

Tmaxrw,N=n=0N111+N1+xmn·Rτ32exprw21+N1+xmn·Rτ (26)

This expression is also a general expression to describe both Tmax and Tmin, while Tmin appears at the end of the period, i.e., xm = 1, as well as the case when rw = 0, Tmax appears at the beginning of the period with xm = 0.

The position of the maximum xm is solved as a function of Rτ, rw, and N. When considering the steady state, when N1/Rτ, xm is shown below, and the results of the cumbersome calculation details can be found in Appendix D:

xm=Rτ9Rτ+32rw23Rτ88Rτ (27)

Based on Equation (27), when considering different values of rw and Rτ, the thermal calculation can be divided into two situations (see Appendix D):

Situation 1: xm=0, when, rw <32+2Rτ whatever Rτ or Rτ small enough (less than 2rw21.5 when rw2>1.5).

Situation 2: xm0, i.e., rw >32+2Rτ, in this situation the maximum temperature is in the middle of the period, and the expressions of Tmax and Tosc should contain xm.

(1) For situation 1, when xm = 0, the limit of Tosc is described as:

Toscrw,N=Tmaxrw,NTminrw,N=exprw2exprw21+N·Rτ1+N·Rτ32N1/Rτexprw2 (28)

The amplitude of the temperature oscillations reaches T00·exprw2 whatever Rτ. It is consistent with our observations in Figure 7, e.g., the amplitudes are 0.368 T00 and 0.018 T00 at rw=1 and rw=2, respectively.

Therefore, for Tmin and Tmax, using the trapezoidal rule for approximation as for rw = 0, we have Tmin from Equation (25):

Tmin(rw,N)12exprw21+Rτ1+Rτ3/2+exprw21+N·Rτ1+N·Rτ3/2+πRτ·rwerfrw1+Rτerfrw1+N·Rτ
Tminrw,N N1/RτTmin(rw,)=exprw21+Rτ21+Rτ3/2+πRτ·rwerfrw1+Rτ (29)

exprw21+Rτ21+Rτ3/2 is called part 1, and πRτ·rwerfrw1+Rτ is called part 2 for further use. Tmax is Tmin + Tosc.

(2) For situation 2, even if xm influences the Tmax and Tosc, its influence is bounded. When xm=0 is used, we calculate the temperature at the beginning of the period and the maximum is thus larger (with a non-zero xm). However, how much larger? In which situations should we care about it? From the analysis, the details are described in Appendix D, we found that the difference appears only around rw=1.6 to 4 when Rτ is large.

Tmin is the same as situation 1. For Tmax, using the trapezoidal rule for approximation as for rw ≠ 0, we have Tmax from Equation (26):

Tmaxrw,N,xmexprw21+xm·Rτ1+xm·Rτ32+exprw21+(1+xm)·Rτ21+1+xm·Rτ32+exprw21+N1+xm·Rτ21+N1+xm·Rτ32+πRτ·rwerfrw1+(1+xm)·Rτerfrw1+N1+xm·Rτ
N1/Rτ exprw21+xm·Rτ1+xm·Rτ32+exprw21+(1+xm)·Rτ21+1+xm·Rτ32+πRτ·rwerfrw1+(1+xm)·Rτ (30)

exprw21+xm·Rτ1+xm·Rτ3/2, exprw21+(1+xm)·Rτ21+(1+xm)·Rτ3/2, πRτ·rwerfrw1+(1+xm)·Rτ are called part 1, 2, and 3, respectively.

The general expression of Tosc (when N tends to infinity or larger than the effective number for reaching the steady state) is given as Tmax (Equation (30)) minus Tmin (Equation (29)), and it reads:

ToscRτ,rw=exprw21+xm·Rτ1+xm·Rτ32+exprw21+(1+xm)·Rτ21+1+xm·Rτ32+πRτ·rwerfrw1+(1+xm)·Rτexprw21+Rτ21+Rτ32πRτ·rwerfrw1+Rτ (31)

Part 1 in Equation (29) and part 2 in Equation (30) are smaller than the other parts by a factor 10, so they can be approximately omitted to simplify the expressions in practice.

ToscRτ,rw exprw21+xm·Rτ1+xm·Rτ32+πRτ·rwerfrw1+(1+xm)·RτπRτ·rwerfrw1+Rτ (32)

It is worth noticing (see Appendix D, Figure A4a,b) that when Rτ increases, Tosc exhibits a small departure from the exact value at around rw = 2, attributed to the existence of a non-zero xm. This departure, if it is generally not negligible, is nevertheless bounded. It is calculated to be  12.44rw3 for a large Rτ (details are shown in Appendix D Figure A4c,d by plotting Tosc according to rw and Rτ). Therefore, the range of Tosc is given by Equations (33) and (34):

ToscRτ,rwRτ0 exprw2 (33)
ToscRτ,rwRτ 12.44rw3 (34)

We note that the oscillation amplitude Tosc at situation 1 is exprw2 which is the minimum, while in situation 2, the amplitude is larger due to the influence of xm, with a maximum value of 12.44rw3 at the place around rw = 2. By now, with these temperature expressions, we obtain the spatial distribution of the minimum and maximum temperature for a given Rτ at steady state, shown in Figure 8. The temperature is oscillating between these two temperature profiles, and note that at rw = 0, the difference is always 1 regardless of Rτ.

Figure 8.

Figure 8

Spatial distribution of Tmin (blue dash, by Equation (29)) and Tmax (red, by Equations (27) and (30)) according to the relative radius rw when (a) Rτ=0.1, (b) Rτ=1, and (c) Rτ=10.

We have now all the information for plotting the T distribution with any Rτ value.

From Figure 8, we can see that when Rτ is small (large frequency or small diffusivity), Tmin and Tmax have no large relative difference compared to their average values because the oscillation amplitude is always limited to exprw2 whereas the Tmean amplitude is converging to 2/Rτ (heat accumulation). This case is interesting if a rather stable temperature is requested. Then, pulse energy can be adjusted for compensating the pulse RR increase. It is also worth noting that, by decreasing Rτ, the shape of the curve converges to the erf(rw) curve and decreases much slower than a Gaussian one.

For large values of Rτ (small frequency or large diffusivity), the oscillations are relatively large as the pulses are separated and thus Tmin appears to have small values. It is negligible (<3%) when Rτ>16 or <6% for Rτ>7). This limits the domain of heat accumulation. The calculation shows that the shape of Tmax is also converging with increasing Rτ to the shape of the beam energy distribution (Gaussian, here exprw2) independent of Rτ. This translates that the maximum is almost whatever the radius, at the beginning of the period. This is not true exactly only around r = 2w where a few % departure from the Gaussian shape of Tmax is demonstrated.

For Rτ intermediate values, the temperature oscillations are limited between Tmax and Tmin. This is shown with particular cases with a shoe box in [31] for Rτ=2 and 20 or in [32] for Rτ=20.

However, in this paper, we regard that when rw > 2, the difference between Tmin and Tmax is vanishing. We see this in [37].

Therefore, we can deduce in particular, in whatever situation of rw and Rτ, the temperature oscillations can be neglected and the use of an average temperature is applicable.

Other application remarks:

  • (1)

    In the intermediate cases around Rτ = 1, the center of the heat-affected zone experiences large temperature oscillations whereas the periphery temperature is not oscillating. This may induce differences in the modification structures along the radius. Specifically, the pedestal of the curve, borne by Tmin, increases in width with Rτ as 1.75+116RτRτ+145Rτ+20;

  • (2)

    For smaller Rτ values, during the transient period (before Nss), the width of the temperature distribution starts with the beam waist (Gaussian) and then increases until a size which is defined by Rτ. It does not increase indefinitely over time. The order of magnitude is one w per two orders of magnitude on Rτ, e.g., the trace width at 1 MHz is twice the one at 10 kHz.

The Effective Number of Pulses for Reaching the Temperature Limits

Since xm is not negligible in very limited circumstances, the effective numbers of pulses for reaching the limit of Tosc, Tmin, and Tmax(Nrsso/ssmin/ssmax) are given in the situation when xm=0.

With the same definition as we calculated in rw=0, with ε being a small quantity and X=11+NRτ, we have Tosc/max/minrw,NTosc/max/minrw,Tosc/max/minrw,<ε. Therefore, the Nrsso/ssmin/ssmax solutions are shown below:

Nssor>3W13e13rw2rw2ε232rw23RτW13e13rw2rw2ε23=1Rτ2rw23W13e13rw2rw2ε231 (35)

This expression does not have an analytic root without using the tabulated function W, i.e., the Lambert W function (defined as ωeω=z, ω=Wz). In practice, since X21, by approximation, it becomes:

Nssor>1Rτ1εexprw2231 (36)

For Nssminr and Nssmaxr, with the approximation of erfXrw2πXrw,

Nssminr>1Rτ2RτεTminrw,21 (37)
Nssmaxr>1Rτ2RτεTmaxrw,21 (38)

The behavior of Nssr according to Rτ for rw = 0 has already been shown in Figure 5, with an overall increase. We have plotted Nsso and Nssmax, according to rw, for Rτ=10 as an example, as shown in Figure 9a, and the plot of the related time for reaching the steady state (using Nssmax and with diffusion time 0.28 µs) in Figure 9b.

Figure 9.

Figure 9

(ac) Effective number of Nssmax (red), Nssmin (blue dash), and Nsso (green) for reaching a steady state according to rw from 0 to 5 when (a)  Rτ=10; (b)  Rτ=1; (c) Rτ=0.1. (d) The time (in μs) for reaching the steady state according to rw from 0 to 5 when Rτ=0.1, 1, and 10.

From Figure 9, we can see that as rw increases, it takes more pulses (three orders of magnitude more) and this corresponds to a longer time to reach the steady state. Therefore, in reality, even though at the exact center of the beam, the temperature is stable, the periphery is still evolving. In particular, in the case of a moving beam, the maximum speed of scanning is limited by the change at the focus periphery increasing from zero.

4. The Mean Temperature in the Period between Two Pulses

For many transformations induced by laser irradiation (fictive temperature, crystallization, erasure of previously induced structures, stress relaxation, and so on), the large temperatures occurring within a pulse period are so brief that the system has no time to significantly respond. On the contrary, for smaller temperatures occurring at the end of the period, the system may have time to respond if the temperatures are not too small (this is the case for overlapping pulse contribution, i.e., heat accumulation). Therefore, the system responds efficiently predominantly for intermediate temperatures in the main part of the period. On the other hand, when Rτ is small (large pulse RR versus diffusion time), temperature oscillations are relatively small whatever the radius, or for large radius values whatever Rτ values (see Figure 8), the temperature oscillation can be neglected. For these, the use of an average temperature is relevant. In any case, the average value can be a guide for following the temperature distribution in space and its evolution. Hence, this section is devoted to simple expressions of average temperature values in the function of material and laser parameters.

We define the averaging by T¯r,N=1τppulse periodat NT(r,t)dt, and this gives:

T¯r,N=1τppulse periodat NTr,tdt (39)

N.B. due to software problem, the average temperature is sometimes quoted as T¯ and sometimes Tmean. They have the same meaning.

4.1. Temperature at the Center (T¯0,N)

T¯0,N=1τptτp=N1tτp=Nn=0N111+tτpn·Rτ32dt (40)

The two summations can be permuted as they do not operate on the same variables and are independent. We obtain:

T¯0,N=1τpn=0N1tτp=N1tτp=N11+(tτpn)Rτ3/2dt=1Rτn=0N121+(tτpn)Rτ1/2tτp=N1tτp=N=2Rτ111+NRτ (41)

This result is obtained without approximation. Then, when N1/Rτ:

T¯0,=limN1/RτT¯0,N=2Rτ  (42)

We note that here, the steady state temperature at the center will reach:

2·T00Rτ=2APπ32κw (43)

It is the same expression as for Tmax0, or Tmin0, for small Rτ values. We can note in Figure 10 that Tmax0, and Tmin0, approach T¯0, when Rτ is decreasing. Tmax0, goes to 1 and Tmin0, goes to 0 when Rτ is large. From Figure 10, we can also find the heat accumulation bound already defined in Figure 5 (with ε = 0,03). It corresponds to Tmin0, = 0.03 and Rτ=12. On the other hand, when Tmin0, departs from Tmax0, by less than approximately 10%, we can admit that the average T is applicable, i.e., for Rτ smaller than 0.17 (purple circle). In this case, we can apply the simple expression Equation (43).

Figure 10.

Figure 10

The plots of Tmin0, (red), Tmax0, (blue dash), and T¯0, (Tmean, green dash) according to 1/Rτ. The defined boundary points of heat accumulation and negligible oscillation in the system are marked by a blue circle and purple circle, respectively (for definitions, see text).

The Effective Number of Pulses for Reaching the Limit T¯0, (Nssm0)

With the same definition as above, the number of pulses to reach T¯0,, i.e., T¯0,T¯0,NT¯0,<ε, Nssm0 is obtained:

Nssm0>1Rτ1ε21 (44)

Nssm0 are compared to Nssmax0 and Nsso0 in Figure 11. The steady state of the mean temperature is reached as Tmax.

Figure 11.

Figure 11

The effective number of pulses to reach the limit of Tosc (red), Tmin (blue dash), Tmax (green dash), and Tmean (pink dash) according to Rτ from 0 to 5.

Therefore, the time for reaching the steady state here is not Rτ dependent: τD1ε21τDε2 = 1111τD when ε=0.03. It is the value of the maximum tss for reaching a steady state when Rτ0 (Figure 6).

With these analytical expressions of temperature at the steady state at the center of the focus (Tosc,Tmin0,,Tmax0,,T¯0,), and the needed number of pulses (Nsso0,Nssmax0,Nssm0), we have a clear view of how parameter Rτ influences the thermal situation at the focus center. The problem is now to extend these results to any place out of the center.

4.2. Temperature out of the Focus Center (T¯r,N)

With the definition T¯r,N=1τppulse periodat NT(r,t)dt, we have the average temperature in a period as:

T¯rw,N=1τptτp=N1tτp=Nn=0N111+tτpn·Rτ32·exprw21+tτpn·Rτ·dt=πRτ·rw·erfrwerfrw1+N·RτN1RτπRτ·rwerfrwSo T¯rw,=πRτ·rwerfrw (45)

This limit when N1/Rτ is shown in Figure 12 and compared to the Gaussian shape of Tmax when Rτ is large and when Rτ is small. When Tmax(r) is Gaussian for the first case, Tmax(r) has the same shape that Tmean has for the second case. As the erf function tends to 1 (already for rw>2), the function tends to be hyperbolic and thus decreases much slower than a Gaussian one (see Figure 12). The amplitude is 2Rτ. It is inversely proportional to Rτ whatever Rτ value.

Figure 12.

Figure 12

Plot of normalized Tmaxrw,Rτ and T¯rw,Rτ at the steady state for Rτ=0.1 and 100 for Tmax and 1 for Tmean.

Consistently with the previously calculated Tmax and Tmin, the Tmean curve width is equal to the beam Gaussian for large Rτ values and to the curve limit given in Equation (45) and shown in Figure 8a which is wider.

The Effective Number of Pulses for Reaching the Limit of Tmean (Nssmr)

The effective number of pulses Nssmr with the approximation erfX·rw2πX·rw as XN,Rτ=11+N·Rτ < 1, is solved to be:

Nssmrrw>1Rτ2Rτ·ε·T¯rw,Rτ21=1Rτ2·rwε·π·erfrw21 (46)

From the expression above, we see that the periphery of the distribution is stabilized later than the center as we noticed already in the previous section.

5. Application Examples

To demonstrate the practical significance of the aforementioned calculations, we are discussing below several problems where we can apply these equations to analyze the temperature effects.

Laser-induced crystallization. It is known that for crystallizing a glass, it is necessary to control temperature and time in order to penetrate the crystallization domain [38]. A method for reaching it with a pulsed laser is described in [39]. It is shown that crystallization with a single pulse is possible from the solid state if the beam scanning speed is sufficiently low according to the nucleation time and crystallization growth rate. For a larger scanning speed, it is necessary to increase the pulse energy or the RR to reach the crystallization domain. This is for the formation of nanocrystals that are orientable with laser polarization. The decrease in the speed leads to the growth of the nanocrystals. In turn, crystallization is still possible if the speed is increased but the pulse energy should be increased. In such a way, the temperature overcomes the melting one during a time long enough in the pulse period and the material is melted in such a way that crystallization does not progress more after each pulse. From the calculations in this paper, the best method appears to be a high RR with moderate pulse energy in order to maintain T (control of Tmax and Tmin) around the crystallization temperature.

Erasure process during laser writing. In the case of pure silica, there is a first regime called type I for which the refractive index increases for pure silica glasses [40,41]. It is partly produced by a change in fictive temperature [42,43]. For that, the time for the temperature to decrease until a given value of temperature has to be larger than the relaxation time of the glass. This time is roughly defined by the cooling time which is itself defined by the moving spatial curve for one pulse [44]. Pulse energy can be adjusted consequently.

In the case of the materials in which type II transformation is achievable giving rise to a large birefringence based on self-organized nanograting (NG) and nanopores, there is a pulse-energy–RR–scanning-speed-related domain [45,46]. This domain is limited for large pulse energies depending on RR. In addition, for large RR values, the retardance decreases until it is no longer possible to write NGs. One of the hypotheses is the following: NG is based on the existence of nanopores distributed in a self-organized NG [9]. Recent work [47] shows that the thermal stability of such an object is defined by the viscosity that itself depends on T. Therefore, as T increases when pulse energy and RR are increased, they have to be limited to avoid an in-pulse erasure after creation during the pulse.

Concurrent processes. In organic materials, according to pulse energy and RR for the same mean power, two different processes are observed whereas we could believe that modification is just dependent on mean power (i.e., dose) [48]. One is the destruction of the material at low RR and high Ep, while the other is the creation of luminophores at high RR and low Ep. We explain this by looking at the amplitude of the T oscillations; we can say that for the first case, the oscillations are large whereas for the other case, they are small. In the first case, the temperature is overcoming the decomposition temperature of the material but not in the second case.

Size of the crystallized trace. In [49], we find a size of the heat-affected zone that is much larger for the glass called Silica-SrTiO3 than for Silica-LiNbO3 for comparable laser parameters. Rτ for the first is 84 and for the second is 11. The first remark is that there is almost no heat accumulation (separated pulse contribution to the temperature) especially for the STS glass. For this glass, it is even possible to use the formula for one contribution. Then, the size is defined by the lowest maximal temperature according to the radius (Equation (30)) at least larger than Tg. Note that due to the expected size of the trace, the use of Tmean is possible for intermediate Rτ values (Equation (45)).

πRτ·rwerfrw=T¯rw,=TgT00

Crown effect. In [49], we also find an example of a crystallized shell (the center is not crystallized). Similarly, as above, there is a highest maximal temperature that is equal to Tmelting. Above this temperature, the viscosity decreases strongly and other processes may appear (see [49]) to be blocking crystallization on cooling.

Speed effect on the laser trace width. In glasses for mid IR [50], the energy threshold for the appearance of a sudden spatial broadening depends on the scanning speed, so we can deduce that it is not related to temperature as the writing speed is not involved in the thermal diffusion for a speed lower than a few m/s.

There are also some remarks that we can deduce from the calculation:

  • -

    If a process is actually independent of RR, it does not depend on temperature (see [46]);

  • -

    The number of pulses received by the material locally depends on the scanning speed. As the number of pulses for reaching a steady state is different at the center than at the periphery, it is possible that the appearance of the trace on the edge depends on the scanning speed during the transient stage;

  • -

    However, the transient stage is not dependent on the pulse energy.

6. Conclusions

This study derives analytical expressions for the temperature distribution at the steady state induced by ultrafast multi-pulses within a spherical geometry, based on the laser and constant material parameters. These expressions depend only on two parameters: the initial temperature at the center (denoted as T00) and a quantity Rτ, defined as the ratio of the pulse period τp to the diffusion time τd. We recall that temperature oscillates between Tmax and Tmin, eventually reaching a steady state, and we calculate the minimum number of pulses required to attain this state. For ease of use, a geometry with spherical symmetry was chosen for the energy deposition in order to lead to simple temperature expressions compiled in Table 3. The Table 4 is a further simplification usable in most of the cases. This approach also facilitates a clear and precise definition of the onset of heat accumulation.

Table 3.

Analytical expressions of final temperature and the effective number for reaching steady state. *: condition of rw,Rτ (Equation (27), Figure A2).

rw  = 0
T0,N T0,N Nss0ε,Rτ
Tosc0,N 1X3 1 1Rτ1ε2/31
Tmin0,N 12X13+X3+2RτX1X 12X13+2RτX1 1Rτ2Rτ·ε·Tmin21
Tmax0,N 1 + TminN 1 + Tmin 1Rτ2Rτ·ε·Tmax21
T¯0,N 2Rτ1X 2Rτ 1Rτ1ε21
rw ≠ 0 *
Tr,N Tr,N Nssrε,Rτ
Toscr,N exprw2X3expX·rw2 exprw2 1Rτ1ε·exprw22/31
Tminr,N 12[X13expX1·rw2+X3expX·rw2]+πRτ·rw[erf(X1·rwerfX·rw] 12X13expX1·rw2+πRτ·rwerfX1·rw 1Rτ2Rτ·ε·Tmin21
Tmaxr,N exprw2+TminN exprw2+Tmin 1Rτ2Rτ·ε·Tmax21
T¯r,N πRτ·rw·erfrwerfX·rw πRτ·rwerfrw 1Rττ2·rwεπ·erf(rw)21

Table 4.

Practical approximated analytical expressions of final temperature and the effective number for reaching steady state. With XN,Rτ=11+N·Rτ and X1Rτ=11+Rτ. *: condition of rw,Rτ (Equation (27), Figure A2).

rw = 0 rw ≠ 0 *
T0,N Nss0ε,Rτ Tr,N Nssrε,Rτ
Toscr,N 1 1Rτ1ε2/31 exprw2 * 1Rτ1ε·exprw22/31
Tminr,N 2RτX1 1Rτ2Rτ·ε·Tmin21 πRτ·rwerfX1·rw 1Rτ2Rτ·ε·Tmin21
Tmaxr,N 1 + Tmin 1Rτ2Rτ·ε·Tmax21 exprw2 + Tmin 1Rτ2Rτ·ε·Tmax21
T¯r,N 2Rτ 1Rτ1ε21 πRτ· rwerfrw 1Rτ2·rwεπ·erf(rw)21

We analyzed the distribution of the temperature oscillations relative to the radius from the center and the parameter Rτ. Oscillations are large at the center for large Rτ values but decrease strongly for a large radius rw > 2, i.e., for the periphery where the light intensity decreases almost by a factor of 10. On the contrary, oscillations are minimal everywhere for small Rτ values (i.e., high frequency or low thermal diffusivity). In such conditions, the average of the temperature from the last period can be used, yielding even simpler expressions. Additionally, we found that the periphery of the focus reaches the steady state later than the center. By examining the pulse number required for the steady state according to the radius, we can better control transformations in these regions and understand the variations from the center.

This work aids in understanding how temperature variations influence different experimental observations, mentioned at the end. It can also be helpful to detect if temperature is acting on the processes of direct laser writing.

Future work includes refining this approach by considering the asymmetry of fs focus, making differences between transversal radius and depth to deduce how the trace changes over time. Another interesting point is the T dependence of the physical–chemical parameters, but this cannot be investigated without finite element calculation. Our approach allows us to choose the most representative parameters for applying such a calculation. In addition, the asymmetry of the focal volume, along and perpendicular to the propagation axis, is a refinement of the present calculations that we could be interested in to include variations with the pulse energy (like Kerr focusing, plasma density defocusing, plasma mirror).

Appendix A

Table A1.

Glossary of laser and material parameters.

Parameters Definitions Units
A Fraction of reflected light by the plasma none
α Light absorption μm−1
ε A small quantity of computational needs none
τp Period of the pulses μs
τD Heat diffusion time τD=w24DT μs
Rτ τp/τD none
w Beam waist radius (at 1/e) μm
DT Thermal diffusivity DT=κρ·Cp m2/s
κ Thermal conductivity W/(m·K)
Ep Pulse energy J
f Pulse repetition rate MHz
ρ Density kg/m3
Cp Specific heat capacity J/(kg·K)

Table A2.

Thermal physico-chemical data of some materials and processing parameters.

ρ (kg/m3) Cp (J/(kg·K)) κ (W/(m·K)) DT (m2/s) τD (µs) Melting Point (K)
STS glass 3887 410 10.1 6.34 × 10−6 0.039 1585
LNS glass 3830 650 2.65 1.06 × 10−6 0.235 1530
SiO2 (glass) 2200 703 1.38 8.92 × 10−7 0.28 1983
Borosilicate (Schott D263) [40] 2510 820 0.96 4.66 × 10−7 0.534 1324
Glycine 1160.7 1266 1.3 [51] 8.85 × 10−7 0.283 506 (decomp.)
Zeonex 1010 1000 0.045 4.445 × 10−8 5.624 553
Nifedipine 1300 1000 0.2 1.54 × 10−7 1.63 446
Sucrose 1587 1243.1 0.1 5.07 × 10−8 4.93 458 (decomp.)

Appendix B. The Existence of a Bound for Tmax and Tmin

Does Tmax theoretically have a limitation?

Since the temperature is the sum of the temperature contribution induced by each pulse, as shown in Equation (10), we need to know the convergence of this sum when the time or pulse number N increases to infinity. A condition necessary but not sufficient is that the increase between the Tmax just after N + 1 pulses and just after N pulses, i.e., tN = (N − 1) τp and tN + 1 = (N) τp, is tending to 0. It is:

Tmax0,tN+1Tmax0,tN=n=0N11+Nn·Rτ32n=0N111+N1n·Rτ32=11+N·Rτ32 (A1)

When Rτ is fixed, Equation (A1) goes to 0 when N tends to infinity. It is the same if we consider the difference of Tmin.

On the other hand, the sum expression of Equations (11) and (12) can be proved to be convergent by using the p-series test, since the p value in them (p = 3/2) is larger than 1 [52].

Appendix C. Expression Approximation

To calculate the limit of the temperature, we start with the evolution of the minimum temperature on each period as long as N increases to infinity (so, with Equation (12), the limit of Tmin (0, tN+1) with N1/Rτ).

Here, we introduce the approximation derived from the trapezoidal rule for the calculation of the integral, which is:

n=0N1fnf0+fN12+0N1fndn (A2)

Here,

fn=11+(Nn)·Rτ32

with an error smaller than N1312N3f(n)n.

Therefore, with this approximation, we obtain:

Tmin0,N 121+Rτ32+121+N·Rτ32+2Rτ11+Rτ11+N·Rτ (A3)

When N goes to infinity, Tmin(0,N) goes to:

Tmin0,=121+Rτ32+2Rτ11+Rτ2Rτ11+Rτ (A4)

Tmax: The same method has been applied to obtain the Tmax limit but with the last term from the sum extracted out (due to the nature of the trapezoidal rule, there is a sharp increment in the temperature of the last pulse, which should not be averaged out):

n=0N1fnfN1+f0+fN22+0N2fndn (A5)
fn=11+(N1n)·Rτ32

We have thus:

Tmax(0,N)1+121+Rτ3/2+121+(N1)Rτ3/2+2Rτ11+Rτ11+(N1)Rτ (A6)

Tmax can also be obtained by the Tmin Equation (A4) + Tosc (Equation (13)), thus:

Tmax(0,N)=1+121+Rτ3/2121+N·Rτ3/2+2Rτ11+Rτ11+N·Rτ (A7)

Both Equation (A6) or Equation (A7), when N tends to infinity:

Tmax0,=1+121+Rτ32+2Rτ11+Rτ1+2Rτ11+Rτ (A8)

The errors: For Tmin, the error is smaller than N1312N3f(n) with fn=15·Rτ241+(Nn)·Rτ7/2 with 0 ≤ nN − 1 [53,54] and has to be compared with Tmin(0,)=121+Rτ3/2+2Rτ11+Rτ. The error is smaller than 1.1% for any value of Rτ, as shown in Figure A1a.

For Tmax, we have an error smaller than N2312(N1)3f(n) with fn=15·Rτ241+(N1n)·Rτ7/2 with 0 ≤ nN − 2. The error has to be compared with Tmax(0,)T0=1+121+Rτ3/2+2Rτ11+Rτ. The error is smaller than 1.7% for any value of Rτ, as shown in Figure A1b.

Figure A1.

Figure A1

The error in using the trapezoidal rule for the approximation of computing. (a) Tmin and (b) Tmax versus Rτ.

Appendix D. About Situation 2 in Section 3.2.1: When the Tmax Is in the Middle of a Pulse Period

To calculate the oscillation amplitude Trosc for r ≠ 0, same as the case of rw = 0, in general, we compare the difference between the maximum T and minimum T of the Nth pulse period. Tmin is considered still at the end of the Nth pulse, i.e., when t=N·τp without the (N + 1)th pulse, so:

Tminrw,N=n=0N111+Nn·Rτ32exprw21+Nn·Rτ (A9)

while Tmax in some situations can be in the middle of the pulse period, we thus set xm, 0xm1 to define the place where the Tmax is. Therefore, Tmax is at t=(N1+xm)τp:

Tmaxrw,N=n=0N111+N1+xmn·Rτ32exprw21+N1+xmn·Rτ (A10)

This expression is the general expression to describe both Tmax and Tmin, while Tmin appearing at the end of the period means xm = 1, as well as the case when rw = 0, Tmax appears at the beginning of the period with xm = 0.

To find the place of the maximum in the period, we search for the root xm of the derivative of Equation (A10). We obtain the root xm as a function of Rτ and rw and N, but to know only the final situation, and also for mathematical solvability, xm is described as Equation (A11) as N1/Rτ. The xm values according to Rτ, rw are plotted in Figure A2.

xm=Rτ9Rτ+32rw23Rτ88Rτ (A11)

Figure A2.

Figure A2

2D map of the solution xm according to Rτ and the reduced radius (r/w). Lines correspond to iso xm.

In Figure A2, xm=0 is located in the center of this map (at rw=0), the boundary is between dark green and green, below it xm is negative and it should be considered to be 0 (this is the maximum T location), i.e., the blue and purple area is also xm=0. In this parameter region (rw, Rτ), the maximum of temperature is at the beginning of the period. From green to yellow then orange, the xm value increases to 0.5 then to 1, i.e., the maximum of temperature is in the middle of the period or even at the end. The boundary between yellow–green and orange is the boundary of xm=1, thus with the parameters in the orange region and red region, xm=1. When in the parameter region of (rw, Rτ), the xm>1 is also considered to be 1. The thermal calculation can be divided into two situations:

  • (1)

    xm=0, for rw <32+2Rτ or Rτ small enough (less than 2rw21.5 when rw2>1.5). In this situation, xm can be omitted from the expression.

  • (2)

    xm0, for rw >32+2Rτ or Rτ>2rw21.5 when rw2>1.5, xm will be appearing in the temperature expressions.

To further analyze the condition in situation 2 that xm can be set to 0, since xm only influences the value of Tmax and Tosc, we analyze Tmax by Equation (A10) with xm in it and the one without xm. Figure A3a,b displays the spatial distribution of Tmax with the xm of the value depending on rw (red) and the one with xm=0 for whatever rw (blue dash).

Figure A3.

Figure A3

(a,b) Spatial distribution of Tmax with the exact expression (xm is a function of Rτ,rw) and simplified expression (xm=0). (a) Rτ=1, (b) Rτ=10. (c) The differences between the two expressions of Rτ=1 0 (red) and 1 (blue dash). (d) The differences between these two expressions according to Rτ.

We can see from Figure A3a that when Rτ=1, the two expressions have no obvious differences, i.e., even when xm0, the approximation by omitting xm in the expression is feasible. While when Rτ=10 (Figure A3b), there are differences appearing around rw=2. The difference distribution is emphasized in Figure A3c. From it, we can see the difference appears around rw=1.6 to 4. The maximum of the difference is around rw=2. However, it can be not negligible if T00 is large. In addition, we observe that the difference around 2 becomes larger as Rτ increases from 1 to 10. Figure A3d shows the difference according to Rτ at rw=2 and 3. From Figure A3d, the differences seem to have a limit which is less than 0.04. Therefore, using the expressions of situation 1 to approximately simulate situation 2, i.e., always xm = 0 is feasible practically, only to have a lower Tmax and smaller Tosc around rw=2, the error will be less than 0.04 T00.

Why is the largest difference at rw=2? That is because when rw is small enough, xm is 0; while when rw is very large, the temperature is quickly decreasing, not mentionning the case when Rτ is large. Therefore, rw=2 is the middle value that is not small enough to cross the xm=0 boundary, and not so far away to have a low temperature.

For calculating the analytical expression of the amplitude of temperature, Tosc at r > 0, due to a non-zero xm value, the parts in the summation of Tmax at this point can no longer be eliminated with the parts of Tmin, except in situation 1. We give the analytical expression for situation 1 first, and the general expression will be presented after having given the expressions for Tmin and Tmax.

When xm = 0, the limit of Tosc is described as:

Toscr,N=Tmaxr,NTminr,N=exprw2exprw21+N·Rτ1+N·Rτ32N1/Rτexprw2 (A12)

The amplitude of the oscillations appears to be T00·exprw2.

For Tmin and Tmax, using the trapezoidal rule for approximation as for rw ≠ 0, we have Tmin from Equation (A9):

Tmin(rw,N)12exprw21+Rτ1+Rτ3/2+exprw21+N·Rτ1+N·Rτ3/2+πRτ·rwerfrw1+Rτerfrw1+N·Rτ (A13)
N1/Rτ exprw21+Rτ21+Rτ3/2+πRτ·rwerfrw1+Rτ (A14)

We call exprw21+Rτ21+Rτ3/2 part 1, and πRτ·rwerfrw1+Rτ part 2.

Furthermore, Tmax from Equation (A10):

Tmaxrw,N,xmexprw21+xm·Rτ1+xm·Rτ32+exprw21+(1+xm)·Rτ21+1+xm·Rτ32+exprw21+N1+xm·Rτ21+N1+xm·Rτ32+πRτ·rwerfrw1+(1+xm)·Rτerfrw1+N1+xm·Rτ
N1/Rτ exprw21+xm·Rτ1+xm·Rτ32+exprw21+(1+xm)·Rτ21+1+xm·Rτ32+πRτ·rwerfrw1+(1+xm)·Rτ (A15)

exprw21+xm·Rτ1+xm·Rτ3/2, exprw21+(1+xm)·Rτ21+(1+xm)·Rτ3/2, πRτ·rwerfrw1+(1+xm)·Rτ are called part 1, 2, and 3, respectively.

The general expression of Tosc (when N tends to infinity or larger than the effective number) is given as Equations (A14) and (A15), and it reads:

ToscRτ,rw=exprw21+xm·Rτ1+xm·Rτ32+exprw21+(1+xm)·Rτ21+1+xm·Rτ32+πRτ·rwerfrw1+(1+xm)·Rτexprw21+Rτ21+Rτ32πRτ·rwerfrw1+Rτ (A16)

Part 1 in Equation (A14) and part 2 in Equation (A15) (i.e., exprw21+(1+xm)·Rτ21+(1+xm)·Rτ3/2 and exprw21+Rτ 21+Rτ3/2) are smaller than the other parts by a factor of 10, so they can be approximately omitted to simplify the expressions in practice. Then, we obtain:

ToscRτ,rw exprw21+xm·Rτ1+xm·Rτ32+πRτ·rwerfrw1+(1+xm)·RτπRτ·rwerfrw1+Rτ (A17)

The plots in Figure A4a are Tosc according to rw at Rτ = 0.1, 1, and 10, accompanied with exprw2 (the result of situation 1) for comparison, while the distribution difference between the exact and the approximation is shown in Figure A4b. It is the same as the difference for Tmax as in Figure A3c. It is also plotted according to Rτ, with rw = 2 and 3, accompanied with exp22 and exp32.

Figure A4.

Figure A4

(a) Spatial distribution of Tosc with the real expression (xm is a function of Rτ,rw) when Rτ=10, 1, and 0.1, and the reduced expression (xm=0) in the pink dash. (b) The differences between the two expressions according to rw. (c) Tosc with the real expression (xm is a function of (Rτ,rw), and the reduced expression (xm=0) according to Rτ at rw=1,2,3. (d) A zoom of Rτ from 0 to 10. (e) Tosc distribution when Rτ=1000 (red), comparing with Tosc in situation 1 (blue dash) and the maximum Tosc value when Rτ according to rw (green).

Similarly to Tmax, we note that from Figure A4a, when Rτ increases, attributed to the non-zero value of xm, compared to situation 1 (xm = 0), the oscillation amplitude has only a small increase around rw = 2 which is sometimes not negligible. The Rτ dependence is shown in Figure A4c,d, and we note that in Figure A4c, the oscillation amplitude at rw = 2 (green dash) and rw = 1 (cyan) increases when Rτ increases, until it reaches a limit. These limits are calculated to be exp3223rw23/2 when Rτ (from Equation (A11), xm·RτRτ23rw21). Figure A4e shows this limit value according to rw around rw = 2.

Therefore, the range of Tosc is given by Equations (A18) and (A19):

ToscRτ,rwxm=0 and in particular when Rτ0 whatever rwexprw2 (A18)
ToscRτ,rwRτ and rw around 212.44rw3 (A19)

We note that the oscillation amplitude Tosc at situation 1 is exprw2 which is the minimum, while in situation 2, the amplitude is larger due to the influence of xm, with a maximum value of 12.44rw3 at a place around rw=2. Therefore, in practice and for accuracy, consistent with Figure A4e, when rw<1.2 or Rτ is small, we can apply Equation (A18). Furthermore, when rw>1.2 or Rτ is large, Equation (A19) can be applied for Tosc. Even though, by using situation 1 for all the situations, the error will be less than the limits shown in Figure A4c.

Author Contributions

Conceptualization, B.P.; funding acquisition, M.L.; investigation, R.Q. and B.P.; methodology, B.P.; project administration, B.P. and M.L.; resources, M.L.; supervision, B.P.; validation, R.Q.; visualization, R.Q.; writing—original draft, B.P. and R.Q.; writing—review and editing, R.Q., B.P. and M.L. All authors have read and agreed to the published version of the manuscript.

Data Availability Statement

Data is contained within the article.

Conflicts of Interest

The authors declare no conflicts of interest.

Funding Statement

This research was funded by Agence Nationale de la Recherche (ANR), FLAG-IR Project, award number ANR-18-CE08-0004-01, and REFRACTEMP project, award number ANR-22-CE08-0001-01. R.Q. acknowledges the China Scholarship Council (CSC) for the funding No. 201808440317 of her PhD fellowship.

Footnotes

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