Table 1.
A comparison of technologies for modulating SiN waveguides
| Reference | Waveguide thickness [nm] | Optically broadband | Modulation frequency | Released | Wavelength | VπL [V ⋅ cm] | Vπ [V] | VπLα [V ⋅ dB] | Size |
|---|---|---|---|---|---|---|---|---|---|
| Hosseini60 | 25 | Yes | DC-629 kHz | No | 640 nm | 12.5 | 12.5a | - | 10 mm |
| Freedman31 | 300 | Yes | 2.31 GHz | Yes | 730 nm | 0.26 | 1.3b | - | 2 mm |
| Jin28 | 175 | No | DC-300 kHz | Yes | 1550 nm | 3.6 | 8 | 1.1 | 1.2 mm × 1.2 mmc |
| Wang30 | 175 | No | DC-20 MHz | No | 1550 nm | 43 | - | 1.3 | 1.2 mm × 1.2 mm |
| Tian29 | 810 | No | ~3 GHz | Yes | 1550 nm | - | - | - | 200 μm × 200 μm |
| Dong61 | 300 | Yes | DC-120 MHz | Yes | 780 nm | 100d | 100d | 39e | 1.3 mm × 0.6 mm |
| This work | 96.5 | Yes | 704 MHz | No | 1550 nm | 54.7 | 9 | 10.17 | 23 mm2 |
VπL for our multi-pass devices is defined using the length of waveguide modulated by the acoustic wave (38 × 1.6 mm = 6.08 cm). Thus, our VπL reflects a property of the waveguide cross section and can be used to compare various waveguide platforms. VπLα uses the total spiral length of 26 cm as all 26 cm of the spiral contribute to insertion loss. See Supplementary Note 5 for further comments. Device size is estimated based on information available in the associated reference. Some devices31,60 have negligible width. In this case, size is reported as a length.
aCalculated using an active length of 10 mm.
bCalculated from modulation length and VπL.
cEstimated based on the ring resonator radius using single stripe waveguides.
dPer phase shifter (i.e., it is not configured as push-pull) at room temperature.
eCalculated using VπL and a waveguide propagation loss of 0.39 dB cm−1.