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. Author manuscript; available in PMC: 2009 Oct 1.
Published in final edited form as: Ultramicroscopy. 2008 Jun 25;108(11):1490–1494. doi: 10.1016/j.ultramic.2008.03.012

Table 1.

AFM data of average and root-mean-square (RMS) surface roughness of copper as a function of different oxygen pressure.

Oxygen Pressure (Torr) Average surface roughness (Å) Root-Mean-Square (RMS) surface roughness (Å)
no oxygen 9.4 11.5
1×10−7 5.2 6.5
1×10−6 4.0 5.1
1×10−5 3.2 4.2