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Features produced in SU-8. (A) Light microscope image of the 10-µm-wide, 20-µm-spaced pits produced in silicone adjoining an area with no features upon its surface. (B) 10-µm-wide, 20-µm-pillar upper surface produced in silicone as an imprint of the mold in A and (C) the lower surface of these features.
