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Proceedings of the National Academy of Sciences of the United States of America logoLink to Proceedings of the National Academy of Sciences of the United States of America
. 1974 Jan;71(1):1–5. doi: 10.1073/pnas.71.1.1

Scanning Transmission Electron Microscopy at High Resolution

J Wall 1, J Langmore 1, M Isaacson 1, A V Crewe 1,*
PMCID: PMC387919  PMID: 4521050

Abstract

We have shown that a scanning transmission electron microscope with a high brightness field emission source is capable of obtaining better than 3 Å resolution using 30 to 40 keV electrons. Elastic dark field images of single atoms of uranium and mercury are shown which demonstrate this fact as determined by a modified Rayleigh criterion. Point-to-point micrograph resolution between 2.5 and 3.0 Å is found in dark field images of micro-crystallites of uranium and thorium compounds. Furthermore, adequate contrast is available to observe single atoms as light as silver.

Keywords: atom motion, electron optics, single atom visibility, carbon films, field emission source

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Selected References

These references are in PubMed. This may not be the complete list of references from this article.

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