Table 1.

The measured and estimated feature size for different forces applied to the polymer pyramid.

z-piezo extension [μm]	Force [mN]	Measured feature edge length [μm]	Estimated feature edge length [μm]
1	0.7	0.56 ± 0.08	0.36[b]
2	2.5	1.04 ± 0.08	1.12[b]
3	4.2	1.26 ± 0.07	1.22[c]
4	7.2	1.45 ± 0.07	1.41[c]
5	9.3	1.60 ± 0.06	1.56[c]
6	13.1	1.77 ± 0.06	1.81[c]
7	15.9	1.99 ± 0.08	1.99[c]
6	12.1	1.74 ± 0.05	1.74[c]
5	8.0	1.54 ± 0.05	1.47[c]
4	5.3	1.30 ± 0.06	1.29[c]
3	2.4	1.07 ± 0.08	1.08[b]
2	0.8	0.53 ± 0.07	0.41[b]
1	0	0[a]	0.07[b]

^[a]The 0-μm feature edge length means no dot is observed.

^[b]Feature edge lengths were estimated accordingto Equation (7) using N = 8000, E = 1.38 MPa, L_top = 70 nm, and ν = 0.33.

^[c]Estimated feature edge length by using N = 8000, E = 8.97 MPa, L_top = 70 nm, ν = 0.33, and z₀ = 2.1 μm as inputs in Equation (8).