Table I.
Measured dimensions of nanoimprinted features.
| Sample | Feature width (nm) | Array periodicity (nm) | Feature spacing (nm) | Feature height (nm) |
|---|---|---|---|---|
| P600 | 215 | 595 | 380 | 300 |
| P300 | 190 | 320 | 130 | 300 |
| P200 | Cap: 70 | 170 | 100 | 210 |
| Cicada wing | Cap: 60 | 170 | 100 | 210 |
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