Table 2.
Parameter | Value |
---|---|
High frequency power | 1.20 kW |
Plasma gas | 10.00 L/min |
Auxiliary gas | 0.60 L/min |
Carrier gas | 0.70 L/min |
Parameter | Value |
---|---|
High frequency power | 1.20 kW |
Plasma gas | 10.00 L/min |
Auxiliary gas | 0.60 L/min |
Carrier gas | 0.70 L/min |