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. 2022 Jun 20;27(12):3951. doi: 10.3390/molecules27123951

Figure 4.

Figure 4

The relationship between leakage current density and applied voltage of manufactured MIM capacitors with different dielectric materials and thicknesses. (a) J-V characteristics of Al2O3 dielectric MIM capacitors. (b) J-V characteristics of TiO2 dielectric MIM capacitors. (c) J-V characteristics of HfO2 dielectric MIM capacitors.